Control of molecular contaminants in porous low-k dielectric films and in UHP gas delivery systems.
by Junpin Yao
Publisher: | Unknows |
Published In: | 25-May-2012 |
ISBN-10: | 1248992237 |
ISBN-13: | 9781248992234 |
Binding Type: | Paperback |
Weight: | 946 gms |
Pages: | pp. 428 |
The Title "Control of molecular contaminants in porous low-k dielectric films and in UHP gas delivery systems." is written by Junpin Yao. This book was published in the year 2520. The ISBN number 1248992237|9781248992234 is assigned to the Paperback version of this title. This book has total of pp. 428 (Pages). The publisher of this title is Unknows. Control of molecular contaminants in porous low-k dielectric films and in UHP gas delivery systems. is currently Not Available with us.You can enquire about this book and we will let you know the availability.