Microfabricated High Aspect Ratio Silicon Flexures Hexsil, Rie, and Koh Etched Design and Fabrication
by Christopher G. Keller
| Publisher: | MEMS Precision Instruments |
| Published In: | 1998 |
| ISBN-10: | 0966637607 |
| ISBN-13: | 9780966637601 |
| Weight: | 200 gms |
| Pages: | pp. xii + 356, Illus. |
The Title "Microfabricated High Aspect Ratio Silicon Flexures Hexsil, Rie, and Koh Etched Design and Fabrication" is written by Christopher G. Keller. This book was published in the year 1998. This book has total of pp. xii + 356 (Pages). The publisher of this title is MEMS Precision Instruments. Microfabricated High Aspect Ratio Silicon Flexures Hexsil, Rie, and Koh Etched Design and Fabrication is currently Not Available with us.You can enquire about this book and we will let you know the availability.