Optimization of polishing kinematics and consumables during chemical mechanical planarization processes.
by Anand Meled
| Publisher: | Unknows |
| Published In: | 17-Jul-2012 |
| ISBN-10: | 1249069904 |
| ISBN-13: | 9781249069904 |
| Binding Type: | Paperback |
| Weight: | 519 gms |
| Pages: | pp. 226 |
The Title "Optimization of polishing kinematics and consumables during chemical mechanical planarization processes." is written by Anand Meled. This book was published in the year 1720. The ISBN number 1249069904|9781249069904 is assigned to the Paperback version of this title. This book has total of pp. 226 (Pages). The publisher of this title is Unknows. Optimization of polishing kinematics and consumables during chemical mechanical planarization processes. is currently Not Available with us.You can enquire about this book and we will let you know the availability.